JPH0636575Y2 - 熱処理装置 - Google Patents

熱処理装置

Info

Publication number
JPH0636575Y2
JPH0636575Y2 JP14076584U JP14076584U JPH0636575Y2 JP H0636575 Y2 JPH0636575 Y2 JP H0636575Y2 JP 14076584 U JP14076584 U JP 14076584U JP 14076584 U JP14076584 U JP 14076584U JP H0636575 Y2 JPH0636575 Y2 JP H0636575Y2
Authority
JP
Japan
Prior art keywords
boat
heat treatment
wafer
loading
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14076584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155335U (en]
Inventor
健一 木下
Original Assignee
東京エレクトロン東北株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン東北株式会社 filed Critical 東京エレクトロン東北株式会社
Priority to JP14076584U priority Critical patent/JPH0636575Y2/ja
Publication of JPS6155335U publication Critical patent/JPS6155335U/ja
Application granted granted Critical
Publication of JPH0636575Y2 publication Critical patent/JPH0636575Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14076584U 1984-09-17 1984-09-17 熱処理装置 Expired - Lifetime JPH0636575Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14076584U JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14076584U JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Publications (2)

Publication Number Publication Date
JPS6155335U JPS6155335U (en]) 1986-04-14
JPH0636575Y2 true JPH0636575Y2 (ja) 1994-09-21

Family

ID=30699114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14076584U Expired - Lifetime JPH0636575Y2 (ja) 1984-09-17 1984-09-17 熱処理装置

Country Status (1)

Country Link
JP (1) JPH0636575Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030057A (en) * 1987-11-06 1991-07-09 Tel Sagami Limited Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
JP2740783B2 (ja) * 1989-11-17 1998-04-15 東京エレクトロン株式会社 熱処理炉装置

Also Published As

Publication number Publication date
JPS6155335U (en]) 1986-04-14

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